The NSF/SRC Operation Modeling and Simulation Virtual Center
 

1. Wafer Fab Operations: Modeling, Analysis, and Design
 

 
 
 
 
John W. Fowler
 
 
Stan Gershwin
P. R. Kumar
 
 

2. Methods for Modeling Stochastic Processes in Semiconductor Manufacturing
 
 

Lee Schruben
 
 

3. Operational Methods Integrating Product Dynamics and Process Models
 
 

 
Michael Fu
 
 
 


Sponsors:
 

 
National Science Foundation
 
Semiconductor Research Corporation
 
 
 
If you have comments or suggestions, e-mail me at ashwin@asu.edu