The NSF/SRC Operation Modeling and Simulation Virtual Center

1. Wafer Fab Operations: Modeling, Analysis, and Design

John W. Fowler
Stan Gershwin
P. R. Kumar

2. Methods for Modeling Stochastic Processes in Semiconductor Manufacturing

Lee Schruben

3. Operational Methods Integrating Product Dynamics and Process Models

Michael Fu


National Science Foundation
Semiconductor Research Corporation
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